MATHEMATICAL PROOF WHY CRYSTALLOGRAPHIC PLANE (111) IS BETTER FOR MICROELECTROMECHANICAL SENSORS SENSING ELEMENTS

Barulina, M.; Markelova, O.
Abstract:
In this research we have obtained mathematical relations between elastic constants, such as Young's modulus and Poisson's ratio, using single-crystalline silicon as an example. When the obtained relations are fulfilled, the influence of misalignment of the crystallographic directions and the coordinate axes associated with the sensing element of microelectromechanical sensors on the stress-strain state and natural frequencies of sensing element will be minimal. Therefore, the influence of such misalignment on the performance of microelectromechanical sensors will also be minimized. Elastic constants of the most commonly used crystallographic planes in microelectromechanical sensor’s design have been analyzed. It has been shown that the elastic constants of crystallographic plane (111) completely conform to the obtained relations, that makes use of crystallographic plane (111) preferable in terms of minimization of the effects of errors in orientation of coordinate axes relative to the crystal structure.
SGEM Research areas:
Year:
2019
Type of Publication:
In Proceedings
Keywords:
MEMS sensor; mathematical model; elastic modulus; elasticity; Poisson’s ratio; shear modulus; silicon; Young’s modulus
Volume:
19
SGEM Book title:
19th International Multidisciplinary Scientific GeoConference SGEM 2019
Book number:
6.1
SGEM Series:
International Multidisciplinary Scientific GeoConference-SGEM
Pages:
229-236
Publisher address:
51 Alexander Malinov blvd, Sofia, 1712, Bulgaria
SGEM supporters:
Bulgarian Acad Sci; Acad Sci Czech Republ; Latvian Acad Sci; Polish Acad Sci; Russian Acad Sci; Serbian Acad Sci & Arts; Slovak Acad Sci; Natl Acad Sci Ukraine; Natl Acad Sci Armenia; Sci Council Japan; World Acad Sci; European Acad Sci, Arts & Letters; Ac
Period:
30 June - 6 July, 2019
ISBN:
978-619-7408-88-1
ISSN:
1314-2704
Conference:
19th International Multidisciplinary Scientific GeoConference SGEM 2019, 30 June - 6 July, 2019
DOI:
10.5593/sgem2019/6.1/S24.030
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