MINIATURISED ACCELEROMETERS ARCHITECTURES, DEVELOPMENT TECHNOLOGIES AND APPLICATIONS

11th International Multidisciplinary Scientific GeoConference SGEM2011, www.sgem.org, SGEM2011 Conference Proceedings/ ISSN 1314-2704, June 20-25, 2011, Vol. 2, 725-732 pp

ABSTRACT

The paper deals with the description of actual technologies and trends in the development of miniaturized accelerometers used in inertial navigation systems. At the technology levels discussions are made around the micro-electro-mechanical systems
(MEMS), nano- electro-mechanical systems (NEMS), micro-opto-electro-mechanical systems (MOEMS), and nano-opto-electro-mechanical systems (NOEMS). Miniature accelerometers use two main methods of detection: 1) moving or bending under the action of an acceleration plate that plays the role of the seismic mass, followed by a
capacitive or piezoelectric detection, and 2) changing the frequency of a vibrating element according to its tension, influenced by the loading of the seismic mass under the action of the acceleration sensor. The methods shown have resulted in five different
miniature accelerometers important architectures: the pendulum, the lateral movement of the seismic mass, the resonant, with electron tunneling and with electrostatic suspension. Finally are discussed the actual and the future applications of the accelerometers, developed using different technologies. The precision classes
considered for the applications are: very-precise navigations, long-range guidance, navigators with 1nm/hr, tactical weapons and commercial consumer applications.

Keywords: Nano and micro accelerometers, design architectures, inertial navigation